Ultimate pressures achieved in TiZrV sputter-coated vacuum chambers

摘要

Two metre long, cylindrical vacuum chambers of diameter ranging from 34 to 100 mm, coated with TiZrV getter films by sputtering, have been baked for about 24 h at temperatures from 120 to 250 degrees C. The ultimate pressures achieved after bakeout were found to correspond to the ratio of the pressure gauge degassing to the effective pumping speed provided by the chamber at the location of the gauge. The results covering a pressure range from 10/sup -11/ Torr down to 10 /sup -13/ Torr are presented and discussed. (6 refs).